SiCおよびGaNウェーハ欠陥検査システム市場調査レポート 2025 – カスタム版

世界のSiCおよびGaNウェーハ欠陥検査システム市場は、2024年に7億7,725万米ドルと評価され、2026年から2031年の予測期間中に18.34%のCAGRで成長し、2031年には2億6,3167万米ドルに達すると予想されています。

SiCおよびGaNウェーハ欠陥検査システム業界は、半導体計測技術の中でも狭義に定義されたセグメントであり、炭化ケイ素（SiC）および窒化ガリウム（GaN）ウェーハ専用のウェーハレベル欠陥検査システムのみを対象としています。対象は、SiC基板、SiCエピタキシーおよびSiCデバイス、GaN基板、GaNエピタキシーおよびGaNデバイスの3つのプロセスステージです。統計的には、このセグメントには、電力、RF、および光電子デバイスに使用される100～200mmのSiCおよびGaNウェーハにおいて、ウェーハ全体または高カバレッジの欠陥検出およびマッピングを実行する自動化ツールが含まれますが、汎用的なシリコンのみの検査ツールやバックエンド/パッケージング検査は含まれません。代表的なシステムは、SiC/GaNウェーハ欠陥検査専用として明示的に販売されています。 KLA の Candela® 8520 は、SiC および GaN 基板とエピタキシャル ウェーハ用の統合表面およびフォトルミネッセンス検査プラットフォームであり、直径 200 mm までの粒子、傷、亀裂、汚れ、ピット、キャロット、基底面転位 (BPD)、マイクロパイプ、積層欠陥、粒界、貫通転位を検出します。レーザーテックのSICA88と次世代SICA108は、表面散乱とPLチャネルを1つのツールに統合し、SiC基板とエピウェーハの表面と結晶の欠陥を同時に検査および分類するSiC専用のウェーハ検査およびレビューシステムです。オントイノベーションのCelero™PLシステムは、レーザーベースの位相検出PLアーキテクチャを使用して、パワーデバイスと化合物半導体ラインからの高まる需要に対応し、SiCとGaNウェーハの表面下および結晶の欠陥の検査と分類に特化して設計されています。X線側では、リガクのXRTmicronとXRTmicron Near-Fabシステムが、SiCやGaNを含む単結晶ウェーハの転位、積層欠陥、マイクロパイプ、粒界の非破壊画像化とマッピングのための高速で高解像度のX線トポグラフィーを提供し、ラボの特性評価とファブ対応の検査の間のギャップを埋めます。

本レポートは、SiCおよびGaNウェーハ欠陥検査システムの世界市場を包括的に分析し、定量的・定性的な分析を交えて提供することを目的としています。これにより、読者の皆様が事業・成長戦略を策定し、市場競争状況を評価し、現在の市場における自社のポジションを分析し、SiCおよびGaNウェーハ欠陥検査システムに関する情報に基づいた意思決定を行う上で役立ちます。

SiCおよびGaNウェーハ欠陥検査システム市場の規模、推定値、および予測は、2024年を基準年として、生産量/出荷台数（台）および売上高（百万ドル）の観点から提供され、2020年から2031年までの実績および予測データも含まれています。

本レポートは、世界のSiCおよびGaNウェーハ欠陥検査システム市場を包括的にセグメント化しています。また、技術別、用途別、およびプレーヤー別の製品に関する地域別市場規模も提供しています。市場をより深く理解するために、本レポートでは競争環境、主要競合他社、そしてそれぞれの市場順位に関する概要を提供しています。また、技術トレンドや新製品開発についても解説しています。

Report Overview

The global SiC & GaN Wafer Defect Inspection System market was valued at US$ 777.25 million in 2024 and is anticipated to reach US$ 2631.67 million by 2031, witnessing a CAGR of 18.34% during the forecast period 2026-2031.

North American is the largest producer of SiC & GaN Wafer Defect Inspection System, the production value is estimated to increase from $ 559.11 million in 2024 to reach $ 1726 million by 2031, at a CAGR of 17.23% during the forecast period of 2024 through 2031.

Japan is the second producer of SiC & GaN Wafer Defect Inspection System, the production value is estimated to increase from $ 128.65 million in 2024 to reach $ 414.63 million by 2031, at a CAGR of 16.75% during the forecast period of 2024 through 2031.

In past few years, China is the fastest-growing production region of SiC & GaN Wafer Defect Inspection System, the production value is estimated to increase from $ 49.51 million in 2024 to reach $ 342.55 million by 2031, at a CAGR of 28.48% during the forecast period of 2024 through 2031.

The major global manufacturers of SiC & GaN Wafer Defect Inspection System include KLA Corporation, Onto Innovation, Rigaku, Angkun Vision (Beijing) Technology, Lasertec, Bruker, Visiontec Group, TASMIT, Inc. (Toray) and HORIBA (EtaMax), etc. In 2024, the world’s top ten vendors accounted for approximately 90 % of the revenue.

The SiC & GaN Wafer Defect Inspection System industry is a narrowly defined segment of semiconductor metrology that covers only wafer-level defect inspection systems dedicated to silicon carbide (SiC) and gallium nitride (GaN) wafers across three process stages: SiC substrate, SiC epitaxy and SiC devices; GaN substrate, GaN epitaxy and GaN devices. In statistical terms, this segment includes automated tools that perform full-wafer or high-coverage defect detection and mapping on 100–200 mm SiC and GaN wafers used in power, RF and optoelectronic devices, but excludes generic silicon-only inspection tools and back-end/packaging inspection. Representative systems are explicitly marketed for SiC/GaN wafer defect inspection. KLA’s Candela® 8520 is an integrated surface- and photoluminescence-inspection platform for SiC and GaN substrates and epitaxial wafers, detecting particles, scratches, cracks, stains, pits, carrots, basal-plane dislocations (BPDs), micropipes, stacking faults, grain boundaries and threading dislocations up to 200 mm diameter. Lasertec’s SICA88 and next-generation SICA108 are SiC-only wafer inspection and review systems that integrate surface scatter and PL channels in a single tool to concurrently inspect and classify surface and crystallographic defects on SiC substrates and epi wafers. Onto Innovation’s Celero™ PL system is designed specifically for subsurface and crystalline defect inspection and classification in SiC and GaN wafers, using a laser-based phase-detection PL architecture to meet growing demand from power-device and compound-semiconductor lines. On the X-ray side, Rigaku’s XRTmicron and XRTmicron Near-Fab systems provide fast, high-resolution X-ray topography for non-destructive imaging and mapping of dislocations, stacking faults, micropipes and grain boundaries in single-crystal wafers including SiC and GaN, bridging the gap between lab characterization and fab-compatible inspection.

Technically, these SiC & GaN wafer defect inspection systems combine several complementary modalities optimized for WBG materials and the six defined applications (SiC/GaN substrate, epi and devices). At the substrate and epitaxy stages, tool design is dominated by wide-field optical inspection with integrated photoluminescence (PL) and X-ray diffraction imaging/topography (XRDI/XRT). The latest PL systems illuminate SiC or GaN wafers with UV/blue lasers and capture variations in PL intensity and lifetime to map micropipes, BPDs, stacking faults and threading dislocations, while simultaneously using dark-field/bright-field scatter channels to capture surface defects such as pits, carrots and scratches—this is explicit in Candela 8520 and SICA88/108 datasheets. XRDI/XRT systems such as XRTmicron exploit diffraction contrast rather than absorption to produce full-wafer images of dislocation networks and grain boundaries, and are increasingly offered in “Near-Fab” configurations with automated wafer handling for routine SiC/GaN substrate and epi-wafer qualification. At the device stage, the same WBG wafers are inspected by a mix of patterned-wafer optical defect tools and electron-beam systems (bright-field/dark-field optical, e-beam inspection, review SEM/CD-SEM, CL-SEM) that focus on lithography, etch and metallization defects but are tuned for the thicker, high-voltage SiC/GaN device topographies; these are not always branded as “SiC/GaN-only”, but in this industry definition they are counted only when configured and deployed on SiC or GaN device lines. Complementary lab-scale methods such as optical microscopy/DIC, AFM and various failure-analysis techniques are essential for understanding defect physics and validating inline methods, but in market statistics they usually form a smaller, supporting share compared with high-throughput PL/XRT systems.

Viewed under this narrow SiC/GaN scope, the SiC & GaN Wafer Defect Inspection System market is already a sizable and fast-growing niche within semiconductor metrology. Dedicated market studies for metrology and inspection equipment serving SiC and GaN estimate a market value of roughly US$ 958 million in 2025 with a ~18.34 % CAGR out to 2031, reflecting the combined spend on PL wafer inspectors, X-ray topography tools and related WBG-focused inspection/metrology platforms. This growth rate is several times higher than the broader wafer-inspection and semiconductor-metrology equipment markets, which are typically forecast in the mid-single-digit to high-single-digit CAGR range over similar horizons. The installed base is dominated by a small group of specialists: KLA (Candela series) for SiC/GaN substrate and epi PL/surface inspection; Lasertec (SICA88/SICA108) for SiC wafer inspection and review; Onto Innovation (Celero PL and compound-semi inspection portfolio) for subsurface and crystalline-defect mapping on SiC and GaN wafers; and Rigaku (XRTmicron family) for production-oriented X-ray topography on SiC and GaN substrates. Adoption is already broad among leading SiC substrate and epi suppliers and is spreading down the value chain into power-device fabs and GaN-device manufacturers, driven by the need to screen crystal and process defects that can trigger premature breakdown, current collapse or long-term reliability issues.

Looking ahead, the segment is shaped by a tension between rapid demand growth and significant technical/economic barriers. On the demand side, the ramp of EV traction inverters and onboard chargers, renewable-energy and grid-tied inverters, industrial motor drives, data-center power supplies and 5G/RF infrastructure is pushing SiC and GaN device shipments upward, and each incremental wafer start requires tighter control of BPDs, stacking faults, threading dislocations and surface defects—directly pulling through more PL/XRT capacity and more advanced inspection algorithms. On the technology side, vendors are moving from simple 2D surface/PL maps to subsurface and quasi-3D PL inspection, as exemplified by Celero PL and high-speed PL scanners, and from lab-only X-ray topography to Near-Fab automated XRT configurations, while increasingly embedding deep-learning-based defect classification and analytics in tools like Lasertec’s SICA108. Key drivers therefore include: the steep growth of SiC/GaN power markets, stricter automotive-grade quality and reliability standards, the migration to 200 mm SiC wafers, and OEM/IDM efforts to reduce scrap and energy use in support of broader sustainability goals. Counterbalancing this, the industry faces high tool cost and cost-of-ownership, limited throughput for XRT/XRDI relative to optical PL systems, a shortage of experienced WBG-materials engineers, and the still-immature state of standardized, fab-wide flows that link detailed defect maps to yield and lifetime specifications. As a result, SiC & GaN Wafer Defect Inspection remains a strategic, high-growth but technically demanding niche, where vendors compete less on raw throughput and more on physics-based sensitivity, subsurface visibility and actionable correlations to power-device performance and reliability.

Report Scope

This report aims to provide a comprehensive presentation of the global market for SiC & GaN Wafer Defect Inspection System, with both quantitative and qualitative analysis, to help readers develop business/growth strategies, assess the market competitive situation, analyze their position in the current marketplace, and make informed business decisions regarding SiC & GaN Wafer Defect Inspection System.

The SiC & GaN Wafer Defect Inspection System market size, estimations, and forecasts are provided in terms of output/shipments (Units) and revenue ($ millions), considering 2024 as the base year, with history and forecast data for the period from 2020 to 2031. This report segments the global SiC & GaN Wafer Defect Inspection System market comprehensively. Regional market sizes, concerning products by Technology, by Application, and by players, are also provided.

For a more in-depth understanding of the market, the report provides profiles of the competitive landscape, key competitors, and their respective market ranks. The report also discusses technological trends and new product developments.

The report will help the SiC & GaN Wafer Defect Inspection System manufacturers, new entrants, and industry chain related companies in this market with information on the revenues, production, and average price for the overall market and the sub-segments across the different segments, by company, by Technology, by Application, and by regions.

Market Segmentation

By Company

• KLA Corporation
• Onto Innovation
• Rigaku
• Angkun Vision (Beijing) Technology
• Lasertec
• Bruker
• Visiontec Group
• TASMIT, Inc. (Toray)
• HORIBA (EtaMax)
• Nanotronics
• Olympus
• CETC Fenghua Information Equipment
• Nikon
• Leica Microsystems
• Skyverse Technology
• Attolight
• LAZIN CO.,LTD
• Spirox Corporation
• Shanghai Youruipu Semiconductor Equipment
• CASI Vision Technology (Luoyang) Co., Ltd
• Dalian Chuangrui Spectral Technology Co., Ltd
• Shenzhen Glint Vision
• T-Vision.AI (Hangzhou) Tech Co.,Ltd.
• HGTECH

Segment by Technology

• Optical Inspection System (Photoluminescence)
• X-ray Diffraction Imaging (XRDI) System
• Optical Microscopy (OM) / DIC
• Atomic Force Microscopy (AFM)
• Others

Segment by Application

• SiC Substrate, Epitaxy and Devices
• GaN Substrate, Epitaxy and Devices

Production by Region

• North America
• China
• Japan
• South Korea
• China Taiwan
• Singapore
• Others

Consumption by Region

• North America
• Europe
• Japan
• China
• China Taiwan
• South Korea
• Singapore
• Malaysia
• Others

Chapter Outline:

Chapter 1: Introduces the report scope of the report, executive summary of different market segments (by region, by Technology, by Application, etc), including the market size of each market segment, future development potential, and so on. It offers a high-level view of the current state of the market and its likely evolution in the short to mid-term, and long term.

Chapter 2: Detailed analysis of SiC & GaN Wafer Defect Inspection System manufacturers competitive landscape, price, production and value market share, latest development plan, merger, and acquisition information, etc.

Chapter 3:  Production/output, value of SiC & GaN Wafer Defect Inspection System by region/country. It provides a quantitative analysis of the market size and development potential of each region in the next six years.

Chapter 4:  Consumption of SiC & GaN Wafer Defect Inspection System in regional level and country level. It provides a quantitative analysis of the market size and development potential of each region and its main countries and introduces the market development, future development prospects, market space, and production of each country in the world.

Chapter 5: Provides the analysis of various market segments by Technology, covering the market size and development potential of each market segment, to help readers find the blue ocean market in different market segments.

Chapter 6: Provides the analysis of various market segments by Application, covering the market size and development potential of each market segment, to help readers find the blue ocean market in different downstream markets.

Chapter 7: Provides profiles of key players, introducing the basic situation of the main companies in the market in detail, including product production/output, value, price, gross margin, product introduction, recent development, etc.

Chapter 8: Analysis of industrial chain, including the upstream and downstream of the industry.

Chapter 9: Introduces the market dynamics, latest developments of the market, the driving factors and restrictive factors of the market, the challenges and risks faced by manufacturers in the industry, and the analysis of relevant policies in the industry.

Chapter 10: The main points and conclusions of the report.

Table of Contents

1 SiC & GaN Wafer Defect Inspection System Market Overview   1

1.1 Product Definition        1

1.2 SiC & GaN Wafer Defect Inspection System by Technology    2

1.2.1 Global SiC & GaN Wafer Defect Inspection System Market Value Growth Rate Analysis by Technology: 2024 VS 2031  2

1.2.2 Optical Inspection System (Photoluminescence)     4

1.2.3 X-ray Diffraction Imaging (XRDI) System 9

1.2.3.1 X-ray Modalities Relevant to SiC & GaN Wafers 10

1.2.3.2 Applications in SiC wafer defect inspection        11

1.2.3.3 Applications in GaN wafer defect inspection       12

1.2.4 Phase Contrast Microscopy      13

1.2.4.1 Applications in SiC Wafer Defect Inspection       14

1.2.4.2 Applications in GaN Wafer Defect Inspection      16

1.2.5 Optical Microscopy (OM)          17

1.2.6 Atomic Force Microscopy (AFM)           20

1.2.7 Cathodoluminescence (CL)       23

1.3 SiC & GaN Wafer Defect Inspection System by Application     25

1.3.1 Global SiC & GaN Wafer Defect Inspection System Market Value Growth Rate Analysis by Application: 2024 VS 2031   25

1.3.2 SiC Material Defects and Their Influence on Device Performance            27

1.3.3 Substrate, Epitaxy and Devices Defect Inspection System Technology            28

1.3.4 SiC Substrate (boule → polished wafer)  29

1.3.5 SiC Epitaxy  31

1.3.6 SiC Devices Manufacturing (Patterned Power Wafers)        33

1.3.7 GaN Substrate Wafer 34

1.3.8 GaN Epitaxy 35

1.3.9 GaN Devices Manufacturing      36

1.4 SiC & GaN Wafer Defect Inspection System by End User       37

1.5 Global Market Growth Prospects  39

1.5.1 Global SiC & GaN Wafer Defect Inspection System Production Value Estimates and Forecasts (2020-2031)          39

1.5.2 Global SiC & GaN Wafer Defect Inspection System Production Capacity Estimates and Forecasts (2020-2031)          40

1.5.3 Global SiC & GaN Wafer Defect Inspection System Production Estimates and Forecasts (2020-2031)            41

1.5.4 Global SiC & GaN Wafer Defect Inspection System Market Average Price Estimates and Forecasts (2020-2031)   42

1.6 Global SiC & GaN Devices Market Size      43

1.6.1 Global SiC Power Devices Market Size Forecasts (2020-2031)            43

1.6.2 Global GaN Devices Market Size Forecasts (2020-2031)    44

1.7 Assumptions and Limitations       44

2 Market Competition by Manufacturers         47

2.1 Global SiC & GaN Wafer Defect Inspection System Production Market Share by Manufacturers (2020-2025)           47

2.2 Global SiC & GaN Wafer Defect Inspection System Production Value Market Share by Manufacturers (2020-2025) 50

2.3 Global SiC & GaN Wafer Defect Inspection System Company Type and Market Share by Company Type (Tier 1, Tier 2, and Tier 3)        52

2.4 Global SiC & GaN Wafer Defect Inspection System Average Price by Manufacturers (2020-2025)           54

2.5 Global Key Manufacturers of SiC & GaN Wafer Defect Inspection System, Manufacturing Sites & Headquarters  55

2.6 Global Key Manufacturers of SiC & GaN Wafer Defect Inspection System, Product Type & Application 56

2.7 Global SiC & GaN Wafer Defect Inspection System Market Competitive Situation and Trends          57

2.7.1 Global SiC & GaN Wafer Defect Inspection System Market Concentration Rate            57

2.7.2 Global 3 and 5 Largest SiC & GaN Wafer Defect Inspection System Players Market Share by Revenue     58

2.8 Mergers & Acquisitions, Expansion           58

3 SiC & GaN Wafer Defect Inspection System Production by Region            60

3.1 Global SiC & GaN Wafer Defect Inspection System Production Value Estimates and Forecasts by Region: 2020 VS 2024 VS 2031     60

3.2 Global SiC & GaN Wafer Defect Inspection System Production Value by Region (2020-2031)         62

3.2.1 Global SiC & GaN Wafer Defect Inspection System Production Value Market Share by Region (2020-2025)           62

3.2.2 Global Forecasted Production Value of SiC & GaN Wafer Defect Inspection System by Region (2026-2031)     63

3.3 Global SiC & GaN Wafer Defect Inspection System Production Estimates and Forecasts by Region: 2020 VS 2024 VS 2031       64

3.4 Global SiC & GaN Wafer Defect Inspection System Production by Region (2020-2031)       66

3.4.1 Global SiC & GaN Wafer Defect Inspection System Production Market Share by Region (2020-2025)         66

3.4.2 Global Forecasted Production of SiC & GaN Wafer Defect Inspection System by Region (2026-2031)       67

3.5 Global SiC & GaN Wafer Defect Inspection System Market Price Analysis by Region (2020-2025)     68

3.6 Global SiC & GaN Wafer Defect Inspection System Production and Value, Year-over-Year Growth     69

3.6.1 North America SiC & GaN Wafer Defect Inspection System Production Value Estimates and Forecasts (2020-2031)  69

3.6.2 China SiC & GaN Wafer Defect Inspection System Production Value Estimates and Forecasts (2020-2031)          69

3.6.3 Japan SiC & GaN Wafer Defect Inspection System Production Value Estimates and Forecasts (2020-2031)          70

3.6.4 South Korea SiC & GaN Wafer Defect Inspection System Production Value Estimates and Forecasts (2020-2031)  71

3.6.5 China Taiwan SiC & GaN Wafer Defect Inspection System Production Value Estimates and Forecasts (2020-2031)  71

3.6.6 Southeast Asia SiC & GaN Wafer Defect Inspection System Production Value Estimates and Forecasts (2020-2031)  72

4 SiC & GaN Wafer Defect Inspection System Consumption by Region            74

4.1 Global SiC & GaN Wafer Defect Inspection System Consumption Estimates and Forecasts by Region: 2020 VS 2024 VS 2031       74

4.2 Global SiC & GaN Wafer Defect Inspection System Consumption by Region (2020-2031)       76

4.2.1 Global SiC & GaN Wafer Defect Inspection System Consumption by Region (2020-2031)         76

4.2.2 Global SiC & GaN Wafer Defect Inspection System Forecasted Consumption by Region (2026-2031)            77

4.3 North America 78

4.4 Europe          79

4.5 China 80

4.6 Japan            81

4.7 South Korea   82

4.8 China Taiwan  83

4.9 Singapore      84

4.10 Malaysia       85

5 Customized Section        86

5.1 Segmentation by type (Optical Inspection System and X-ray Diffraction Imaging (XRDI) System)      86

5.1.1 Global SiC & GaN Wafer Defect Inspection System Production by Technology (2020-2031)   86

5.1.1.1 Global SiC & GaN Wafer Defect Inspection System Production by Technology (2020-2025)   86

5.1.1.2 Global SiC & GaN Wafer Defect Inspection System Production by Technology (2026-2031)   86

5.1.1.3 Global SiC & GaN Wafer Defect Inspection System Production Market Share by Technology (2020-2031)   87

5.1.2 Global SiC & GaN Wafer Defect Inspection System Production Value by Technology (2020-2031)   88

5.1.2.1 Global SiC & GaN Wafer Defect Inspection System Production Value by Technology (2020-2025)           88

5.1.2.2 Global SiC & GaN Wafer Defect Inspection System Production Value by Technology (2026-2031)           89

5.1.2.3 Global SiC & GaN Wafer Defect Inspection System Production Value Market Share by Technology (2020-2031)     89

5.1.3 Global SiC & GaN Wafer Defect Inspection System Price by Technology (2020-2031)       90

5.2 Segmentation by application ( SiC Substrate, Epitaxy and Devices and GaN Substrate, Epitaxy and Devices ) 92

5.2.1 Global SiC & GaN Wafer Defect Inspection System Production by Application (2020-2031)    92

5.2.1.1 Global SiC & GaN Wafer Defect Inspection System Production by Application (2020-2025)    92

5.2.1.2 Global SiC & GaN Wafer Defect Inspection System Production by Application (2026-2031)    92

5.2.1.3 Global SiC & GaN Wafer Defect Inspection System Production Market Share by Application (2020-2031)    92

5.2.2 Global SiC & GaN Wafer Defect Inspection System Production Value by Application (2020-2031)    94

5.2.2.1 Global SiC & GaN Wafer Defect Inspection System Production Value by Application (2020-2025)            94

5.2.2.2 Global SiC & GaN Wafer Defect Inspection System Production Value by Application (2026-2031)            94

5.2.2.3 Global SiC & GaN Wafer Defect Inspection System Production Value Market Share by Application (2020-2031)      94

5.2.3 Global SiC & GaN Wafer Defect Inspection System Price by Application (2020-2031)       95

5.3 Technology Segmentation (Photoluminescence, Phase Contrast Microscopy, AFM, XRT, etc). 97

5.3.1 Global SiC & GaN Wafer Defect Inspection System Production by Technology (2020-2031)   97

5.3.1.1 Global SiC & GaN Wafer Defect Inspection System Production by Technology (2020-2025)   97

5.3.1.2 Global SiC & GaN Wafer Defect Inspection System Production by Technology (2026-2031)   97

5.3.1.3 Global SiC & GaN Wafer Defect Inspection System Production Market Share by Technology (2020-2031)   98

5.3.2 Global SiC & GaN Wafer Defect Inspection System Production Value by Technology (2020-2031)   99

5.3.2.1 Global SiC & GaN Wafer Defect Inspection System Production Value by Technology (2020-2025)           99

5.3.2.2 Global SiC & GaN Wafer Defect Inspection System Production Value by Technology (2026-2031)           100

5.3.2.3 Global SiC & GaN Wafer Defect Inspection System Production Value Market Share by Technology (2020-2031)     100

5.3.3 Global SiC & GaN Wafer Defect Inspection System Price by Technology (2020-2031)       101

5.4 Application Segmentation (Substrate, Epi, Device, Sub/Surface)            103

5.4.1 Global SiC & GaN Wafer Defect Inspection System Production by Application (2020-2031)    103

5.4.1.1 Global SiC & GaN Wafer Defect Inspection System Production by Application (2020-2025)    103

5.4.1.2 Global SiC & GaN Wafer Defect Inspection System Production by Application (2026-2031)    103

5.4.1.3 Global SiC & GaN Wafer Defect Inspection System Production Market Share by Application (2020-2031)    104

5.4.2 Global SiC & GaN Wafer Defect Inspection System Production Value by Application (2020-2031)    105

5.4.2.1 Global SiC & GaN Wafer Defect Inspection System Production Value by Application (2020-2025)            105

5.4.2.2 Global SiC & GaN Wafer Defect Inspection System Production Value by Application (2026-2031)            106

5.4.2.3 Global SiC & GaN Wafer Defect Inspection System Production Value Market Share by Application (2020-2031)      106

5.4.3 Global SiC & GaN Wafer Defect Inspection System Price by Application (2020-2031)       107

5.5 User Segmentation As Well: Epi-Ready Wafers Manufacturers, Epi-Wafers Manufacturers, Epi-Only Providers, Device Manufacturers, Etc            109

6 Segment by Technology  111

6.1 Global SiC & GaN Wafer Defect Inspection System Production by Technology (2020-2031)   111

6.1.1 Global SiC & GaN Wafer Defect Inspection System Production by Technology (2020-2025)   111

6.1.2 Global SiC & GaN Wafer Defect Inspection System Production by Technology (2026-2031)   111

6.1.3 Global SiC & GaN Wafer Defect Inspection System Production Market Share by Technology (2020-2031)   112

6.2 Global SiC & GaN Wafer Defect Inspection System Production Value by Technology (2020-2031)   113

6.2.1 Global SiC & GaN Wafer Defect Inspection System Production Value by Technology (2020-2025)   113

6.2.2 Global SiC & GaN Wafer Defect Inspection System Production Value by Technology (2026-2031)   114

6.2.3 Global SiC & GaN Wafer Defect Inspection System Production Value Market Share by Technology (2020-2031)     114

6.3 Global SiC & GaN Wafer Defect Inspection System Price by Technology (2020-2031)       115

7 Segment by Application    117

7.1 Global SiC & GaN Wafer Defect Inspection System Production by Application (2020-2031)    117

7.1.1 Global SiC & GaN Wafer Defect Inspection System Production by Application (2020-2025)    117

7.1.2 Global SiC & GaN Wafer Defect Inspection System Production by Application (2026-2031)    117

7.1.3 Global SiC & GaN Wafer Defect Inspection System Production Market Share by Application (2020-2031)    118

7.2 Global SiC & GaN Wafer Defect Inspection System Production Value by Application (2020-2031)    119

7.2.1 Global SiC & GaN Wafer Defect Inspection System Production Value by Application (2020-2025)    119

7.2.2 Global SiC & GaN Wafer Defect Inspection System Production Value by Application (2026-2031)    119

7.2.3 Global SiC & GaN Wafer Defect Inspection System Production Value Market Share by Application (2020-2031)      120

7.3 Global SiC & GaN Wafer Defect Inspection System Price by Application (2020-2031)       121

8 Key Companies Profiled   123

8.1 KLA Corporation          123

8.1.1 KLA Corporation SiC & GaN Wafer Defect Inspection System Company Information          123

8.1.2 KLA Corporation SiC & GaN Wafer Defect Inspection System Product Portfolio 124

8.1.3 KLA’s SiC / GaN Wafer Defect Inspection – Advantages, Weaknesses & Roadmap          130

8.1.4 KLA Corporation SiC & GaN Wafer Defect Inspection System Production, Value, Price and Gross Margin (2020-2025)    132

8.1.5 KLA Corporation Main Business and Markets Served          132

8.1.6 KLA Corporation Recent Developments/Updates   138

8.2 Lasertec        140

8.2.1 Lasertec SiC & GaN Wafer Defect Inspection System Company Information          140

8.2.2 Lasertec SiC & GaN Wafer Defect Inspection System Product Portfolio            140

8.2.3 Lasertec Strengths, Weaknesses and Roadmap for Lasertec WBG Wafer Inspection   144

8.2.4 Lasertec SiC & GaN Wafer Defect Inspection System Production, Value, Price and Gross Margin (2020-2025)            147

8.2.5 Lasertec Main Business and Markets Served        148

8.2.6 Lasertec Recent Developments/Updates 150

8.3 Onto Innovation           150

8.3.1 Onto Innovation SiC & GaN Wafer Defect Inspection System Company Information          150

8.3.2 Onto Innovation SiC & GaN Wafer Defect Inspection System Product Portfolio 151

8.3.3 Onto Innovation Strengths, weaknesses and roadmap in SiC/GaN defect inspection           153

8.3.4 Onto Innovation SiC & GaN Wafer Defect Inspection System Production, Value, Price and Gross Margin (2020-2025)    156

8.3.5 Onto Innovation Main Business and Markets Served            156

8.3.6 Onto Innovation Recent Developments/Updates    158

8.4 Visiontec Group           158

8.4.1 Visiontec Group SiC & GaN Wafer Defect Inspection System Company Information          158

8.4.2 Visiontec Group SiC & GaN Wafer Defect Inspection System Product Portfolio 159

8.4.3 Visiontec Group Strengths, Weaknesses and Roadmap        162

8.4.4 Visiontec Group SiC & GaN Wafer Defect Inspection System Production, Value, Price and Gross Margin (2020-2025)    163

8.4.5 Visiontec Group Main Business and Markets Served           163

8.5 Nanotronics    164

8.5.1 Nanotronics SiC & GaN Wafer Defect Inspection System Company Information          164

8.5.2 Nanotronics SiC & GaN Wafer Defect Inspection System Product Portfolio 165

8.5.3 Nanotronics SiC & GaN Wafer Defect Inspection System Production, Value, Price and Gross Margin (2020-2025)    167

8.5.4 Nanotronics Main Business and Markets Served    168

8.5.5 Nanotronics Recent Developments/Updates         168

8.6 Toray Engineering (TASMIT, Inc.) 170

8.6.1 TASMIT, Inc. SiC & GaN Wafer Defect Inspection System Company Information          170

8.6.2 TASMIT, Inc. SiC & GaN Wafer Defect Inspection System Product Portfolio 171

8.6.3 TASMIT, Inc. Strengths, weaknesses & roadmap in SiC/GaN wafer defect inspection  177

8.6.4 TASMIT, Inc. SiC & GaN Wafer Defect Inspection System Production, Value, Price and Gross Margin (2020-2025)    179

8.6.5 TASMIT, Inc. Main Business and Markets Served    179

8.7 Bruker          180

8.7.1 Bruker SiC & GaN Wafer Defect Inspection System Company Information          180

8.7.2 Bruker SiC & GaN Wafer Defect Inspection System Product Portfolio            180

8.7.3 Bruker Strengths, weaknesses and roadmap in SiC/GaN defect inspection           184

8.7.4 Bruker Future development directions (inferred roadmap)    185

8.7.5 Bruker SiC & GaN Wafer Defect Inspection System Production, Value, Price and Gross Margin (2020-2025)            186

8.7.6 Bruker Main Business and Markets Served           186

8.8 HORIBA (Acquired EtaMax)         190

8.8.1 HORIBA SiC & GaN Wafer Defect Inspection System Company Information          190

8.8.2 HORIBA SiC & GaN Wafer Defect Inspection System Product Portfolio            190

8.8.3 HORIBA Technical Strengths, Weaknesses & Future Direction            202

8.8.4 HORIBA SiC & GaN Wafer Defect Inspection System Production, Value, Price and Gross Margin (2020-2025)            204

8.8.5 HORIBA Main Business and Markets Served         204

8.8.6 HORIBA Recent Developments/Updates  206

8.9 LAZIN CO.,LTD 208

8.9.1 LAZIN CO.,LTD SiC & GaN Wafer Defect Inspection System Company Information          208

8.9.2 LAZIN CO.,LTD SiC & GaN Wafer Defect Inspection System Product Portfolio 208

8.9.3 LAZIN CO.,LTD SiC & GaN Wafer Defect Inspection System Production, Value, Price and Gross Margin (2020-2025)    209

8.9.4 LAZIN CO.,LTD Main Business and Markets Served 210

8.10 EtaMax        210

8.10.1 EtaMax SiC & GaN Wafer Defect Inspection System Company Information          210

8.10.2 EtaMax SiC & GaN Wafer Defect Inspection System Product Portfolio            211

8.10.3 EtaMax SiC & GaN Wafer Defect Inspection System Production, Value, Price and Gross Margin (2020-2025)            215

8.10.4 EtaMax Main Business and Markets Served        215

8.11 Spirox Corporation     216

8.11.1 Spirox Corporation SiC & GaN Wafer Defect Inspection System Company Information         216

8.11.2 Spirox Corporation SiC & GaN Wafer Defect Inspection System Product Portfolio  217

8.11.3 Spirox Corporation SiC & GaN Wafer Defect Inspection System Production, Value, Price and Gross Margin (2020-2025) 220

8.11.4 Spirox Corporation Main Business and Markets Served      220

8.11.5 Spirox Corporation Recent Developments/Updates           221

8.12 Angkun Vision (Beijing) Technology        222

8.12.1 Angkun Vision (Beijing) Technology SiC & GaN Wafer Defect Inspection System Company Information          222

8.12.2 Angkun Vision (Beijing) Technology SiC & GaN Wafer Defect Inspection System Product Portfolio  222

8.12.3 Angkun Vision (Beijing) Technology SiC & GaN Wafer Defect Inspection System Production, Value, Price and Gross Margin (2020-2025)            223

8.12.4 Angkun Vision (Beijing) Technology Main Business and Markets Served            223

8.13 Shenzhen Glint Vision   224

8.13.1 Shenzhen Glint Vision SiC & GaN Wafer Defect Inspection System Company Information         224

8.13.2 Shenzhen Glint Vision SiC & GaN Wafer Defect Inspection System Product Portfolio  225

8.13.3 Shenzhen Glint Vision SiC & GaN Wafer Defect Inspection System Production, Value, Price and Gross Margin (2020-2025) 226

8.13.4 Shenzhen Glint Vision Main Business and Markets Served   226

8.14 CETC Fenghua Information Equipment      227

8.14.1 CETC Fenghua Information Equipment SiC & GaN Wafer Defect Inspection System Company Information          227

8.14.2 CETC Fenghua Information Equipment SiC & GaN Wafer Defect Inspection System Product Portfolio  227

8.14.3 CETC Fenghua Information Equipment SiC & GaN Wafer Defect Inspection System Production, Value, Price and Gross Margin (2020-2025)            232

8.14.4 CETC Fenghua Information Equipment Main Business and Markets Served   232

8.15 CASI Vision Technology (Luoyang) Co., Ltd           233

8.15.1 CASI Vision Technology (Luoyang) Co., Ltd SiC & GaN Wafer Defect Inspection System Company Information          233

8.15.2 CASI Vision Technology (Luoyang) Co., Ltd SiC & GaN Wafer Defect Inspection System Product Portfolio  234

8.15.3 CASI Vision Technology (Luoyang) Co., Ltd SiC & GaN Wafer Defect Inspection System Production, Value, Price and Gross Margin (2020-2025)            235

8.15.4 CASI Vision Technology (Luoyang) Co., Ltd Main Business and Markets Served   235

8.16 Shanghai Youruipu Semiconductor Equipment         235

8.16.1 Shanghai Youruipu Semiconductor Equipment SiC & GaN Wafer Defect Inspection System Company Information          236

8.16.2 Shanghai Youruipu Semiconductor Equipment SiC & GaN Wafer Defect Inspection System Product Portfolio  236

8.16.3 Shanghai Youruipu Semiconductor Equipment SiC & GaN Wafer Defect Inspection System Production, Value, Price and Gross Margin (2020-2025)            240

8.16.4 Shanghai Youruipu Semiconductor Equipment Main Business and Markets Served    241

8.17 Timetech Spectra (Dalian Chuangrui Spectral Technology Co., Ltd)            241

8.17.1 Dalian Chuangrui Spectral Technology Co., Ltd SiC & GaN Wafer Defect Inspection System Company Information 242

8.17.2 Dalian Chuangrui Spectral Technology Co., Ltd SiC & GaN Wafer Defect Inspection System Product Portfolio     242

8.17.3 Dalian Chuangrui Spectral Technology Co., Ltd SiC & GaN Wafer Defect Inspection System Production, Value, Price and Gross Margin (2020-2025)    244

8.17.4 Dalian Chuangrui Spectral Technology Co., Ltd Main Business and Markets Served    244

8.18 T-Vision.AI (Hangzhou) Tech Co.,Ltd.      245

8.18.1 T-Vision.AI (Hangzhou) Tech Co.,Ltd. SiC & GaN Wafer Defect Inspection System Company Information          245

8.18.2 T-Vision.AI (Hangzhou) Tech Co.,Ltd. SiC & GaN Wafer Defect Inspection System Product Portfolio  245

8.18.3 T-Vision.AI (Hangzhou) Tech Co.,Ltd. SiC & GaN Wafer Defect Inspection System Production, Value, Price and Gross Margin (2020-2025)            246

8.18.4 T-Vision.AI (Hangzhou) Tech Co.,Ltd. Main Business and Markets Served   247

8.19 HGTECH      247

8.19.1 HGTECH SiC & GaN Wafer Defect Inspection System Company Information          247

8.19.2 HGTECH SiC & GaN Wafer Defect Inspection System Product Portfolio            248

8.19.3 HGTECH SiC & GaN Wafer Defect Inspection System Production, Value, Price and Gross Margin (2020-2025)            248

8.19.4 HGTECH Main Business and Markets Served       249

8.20 Olympus (Evident)      249

8.20.1 Olympus SiC & GaN Wafer Defect Inspection System Company Information          249

8.20.2 Olympus SiC & GaN Wafer Defect Inspection System Product Portfolio            250

8.20.3 Olympus SiC & GaN Wafer Defect Inspection System Production, Value, Price and Gross Margin (2020-2025)            251

8.20.4 Olympus Main Business and Markets Served       251

8.21 Nikon Instruments       253

8.21.1 Nikon SiC & GaN Wafer Defect Inspection System Company Information          253

8.21.2 Nikon SiC & GaN Wafer Defect Inspection System Product Portfolio            253

8.21.3 Nikon SiC & GaN Wafer Defect Inspection System Production, Value, Price and Gross Margin (2020-2025)            254

8.21.4 Nikon Main Business and Markets Served           255

8.22 Leica Microsystems    255

8.22.1 Leica Microsystems SiC & GaN Wafer Defect Inspection System Company Information         256

8.22.2 Leica Microsystems SiC & GaN Wafer Defect Inspection System Product Portfolio  256

8.22.3 Leica Microsystems SiC & GaN Wafer Defect Inspection System Production, Value, Price and Gross Margin (2020-2025) 257

8.22.4 Leica Microsystems Main Business and Markets Served    257

8.23 Rigaku         258

8.23.1 Rigaku SiC & GaN Wafer Defect Inspection System Company Information          258

8.23.2 Rigaku SiC & GaN Wafer Defect Inspection System Product Portfolio            259

8.23.3 Rigaku SiC & GaN Wafer Defect Inspection System Production, Value, Price and Gross Margin (2020-2025)            259

8.23.4 Rigaku Main Business and Markets Served         260

8.24 Attolight      260

8.24.1 Attolight SiC & GaN Wafer Defect Inspection System Company Information          260

8.24.2 Attolight SiC & GaN Wafer Defect Inspection System Product Portfolio            261

8.24.3 Attolight SiC & GaN Wafer Defect Inspection System Production, Value, Price and Gross Margin (2020-2025)            262

8.24.4 Attolight Main Business and Markets Served      262

9 Industry Chain and Sales Channels Analysis   263

9.1 SiC & GaN Wafer Defect Inspection System Industry Chain Analysis            263

9.2 SiC & GaN Wafer Defect Inspection System Raw Material Supply Analysis            263

9.2.1 Key Raw Materials     263

9.2.2 Raw Materials Key Suppliers     264

9.3 SiC & GaN Wafer Defect Inspection System Production Mode & Process Analysis  264

9.4 SiC & GaN Wafer Defect Inspection System Sales and Marketing            266

9.5 SiC & GaN Wafer Defect Inspection System Customer Analysis            268

10 SiC & GaN Wafer Defect Inspection System Market Dynamics 270

10.1 SiC & GaN Wafer Defect Inspection System Industry Trends 270

10.2 SiC & GaN Wafer Defect Inspection System Market Drivers  272

10.3 SiC & GaN Wafer Defect Inspection System Market Challenges            275

10.4 SiC & GaN Wafer Defect Inspection System Market Restraints            277

11 Research Findings and Conclusion 279

12 Methodology and Data Source     282

12.1 Methodology/Research Approach           282

12.1.1 Research Programs/Design    282

12.1.2 Market Size Estimation          283

12.1.3 Market Breakdown and Data Triangulation          284

12.2 Data Source 285

12.2.1 Secondary Sources  285

12.2.2 Primary Sources      286

12.3 Author List   287

12.4 Disclaimer    288

Tables and Figures

Table 1. Global SiC & GaN Wafer Defect Inspection System Market Value by Technology, (US$ Million) & (2024 VS 2031)   2

Table 2. Optical photoluminescence (PL) Applications in SiC Wafer Defect Inspection           5

Table 3. Optical photoluminescence (PL) Applications in GaN Wafer Defect Inspection           6

Table 4. Optical Inspection System (Photoluminescence) Manufacturers            8

Table 5. X-ray Modalities Relevant to SiC & GaN Wafers            10

Table 6. Applications in SiC wafer defect inspection       11

Table 7. Applications in GaN wafer defect inspection     12

Table 8. Optical Microscopy (OM) SiC & GaN Wafer Inspection     17

Table 9. AFM Applications in SiC Wafer Defect Inspection           21

Table 10. AFM Applications in GaN Wafer Defect Inspection        22

Table 11. CL in SiC Wafer Defect Inspection    23

Table 12. CL in GaN Wafer Defect Inspection   24

Table 13. Global SiC & GaN Wafer Defect Inspection System Market Value by Application, (US$ Million) & (2024 VS 2031)            25

Table 14. Global SiC & GaN Wafer Defect Inspection System Market Value by Application, (US$ Million) & (2024 VS 2031)            26

Table 15. SiC Material Defects and Their Influence on Device Performance            27

Table 16. SiC & GaN Substrate, Epitaxy and Devices Defect Inspection System Technology           28

Table 17. SiC Substrate Primary Wafer Defect Inspection System 29

Table 18. SiC Epitaxy Primary Wafer Defect Inspection System    32

Table 19. SiC Devices (patterned power wafers) Primary Wafer Defect Inspection System 33

Table 20. GaN Substrate Primary Wafer Defect Inspection System            34

Table 21. GaN Epitaxy Primary Wafer Defect Inspection System   36

Table 22. GaN Devices Manufacturing Primary Wafer Defect Inspection System  37

Table 23. Global SiC & GaN Wafer Defect Inspection System Market Value by End User, (US$ Million) & (2024 VS 2031)  37

Table 24. Global SiC & GaN Wafer Defect Inspection System Production by Manufacturers (2020-2025) & (Units)           47

Table 25. Global SiC & GaN Wafer Defect Inspection System Production Market Share by Manufacturers (2020-2025) 48

Table 26. Global SiC & GaN Wafer Defect Inspection System Production Value by Manufacturers (2020-2025) & (US$ Million)           50

Table 27. Global SiC & GaN Wafer Defect Inspection System Production Value Share by Manufacturers (2020-2025)           51

Table 28. Global Company Type (Tier 1, Tier 2, and Tier 3) & (based on the Production Value in SiC & GaN Wafer Defect Inspection System as of 2024)            53

Table 29. Global Market SiC & GaN Wafer Defect Inspection System Average Price by Manufacturers (K US$/Unit) & (2020-2025)   54

Table 30. Global Key Manufacturers of SiC & GaN Wafer Defect Inspection System, Manufacturing Sites & Headquarters   55

Table 31. Global Key Manufacturers of SiC & GaN Wafer Defect Inspection System, Product Type & Application  56

Table 32. Global SiC & GaN Wafer Defect Inspection System Manufacturers Market Concentration Ratio (CR5 and HHI)       57

Table 33. Mergers & Acquisitions, Expansion Plans        58

Table 34. Global SiC & GaN Wafer Defect Inspection System Production Value Growth Rate by Region: 2020 VS 2024 VS 2031 (US$ Million)    60

Table 35. Global SiC & GaN Wafer Defect Inspection System Production Value (US$ Million) by Region (2020-2025) 62

Table 36. Global SiC & GaN Wafer Defect Inspection System Production Value Market Share by Region (2020-2025)           63

Table 37. Global SiC & GaN Wafer Defect Inspection System Production Value (US$ Million) Forecast by Region (2026-2031) 63

Table 38. Global SiC & GaN Wafer Defect Inspection System Production Value Market Share Forecast by Region (2026-2031)           64

Table 39. Global SiC & GaN Wafer Defect Inspection System Production Comparison by Region: 2020 VS 2024 VS 2031 (Units) 64

Table 40. Global SiC & GaN Wafer Defect Inspection System Production (Units) by Region (2020-2025)        66

Table 41. Global SiC & GaN Wafer Defect Inspection System Production Market Share by Region (2020-2025)           66

Table 42. Global SiC & GaN Wafer Defect Inspection System Production (Units) Forecast by Region (2026-2031)        67

Table 43. Global SiC & GaN Wafer Defect Inspection System Production Market Share Forecast by Region (2026-2031)           67

Table 44. Global SiC & GaN Wafer Defect Inspection System Market Average Price (K US$/Unit) by Region (2020-2025)    68

Table 45. Global SiC & GaN Wafer Defect Inspection System Market Average Price (K US$/Unit) by Region (2026-2031)    68

Table 46. Global SiC & GaN Wafer Defect Inspection System Consumption Growth Rate by Region: 2020 VS 2024 VS 2031 (Units)            74

Table 47. Global SiC & GaN Wafer Defect Inspection System Consumption by Region (2020-2025) & (Units)        76

Table 48. Global SiC & GaN Wafer Defect Inspection System Consumption Market Share by Region (2020-2025)           77

Table 49. Global SiC & GaN Wafer Defect Inspection System Forecasted Consumption by Region (2026-2031) & (Units)            77

Table 50. Global SiC & GaN Wafer Defect Inspection System Forecasted Consumption Market Share by Region (2020-2025)      78

Table 51. Global SiC & GaN Wafer Defect Inspection System Production (Units) by Technology (2020-2025)  86

Table 52. Global SiC & GaN Wafer Defect Inspection System Production (Units) by Technology (2026-2031)  86

Table 53. Global SiC & GaN Wafer Defect Inspection System Production Market Share by Technology (2020-2025)     87

Table 54. Global SiC & GaN Wafer Defect Inspection System Production Market Share by Technology (2026-2031)     87

Table 55. Global SiC & GaN Wafer Defect Inspection System Production Value (US$ Million) by Technology (2020-2025)       88

Table 56. Global SiC & GaN Wafer Defect Inspection System Production Value (US$ Million) by Technology (2026-2031)       89

Table 57. Global SiC & GaN Wafer Defect Inspection System Production Value Market Share by Technology (2020-2025)     89

Table 58. Global SiC & GaN Wafer Defect Inspection System Production Value Market Share by Technology (2026-2031)     89

Table 59. Global SiC & GaN Wafer Defect Inspection System Price (K US$/Unit) by Technology (2020-2025)         90

Table 60. Global SiC & GaN Wafer Defect Inspection System Price (K US$/Unit) by Technology (2026-2031)         91

Table 61. Global SiC & GaN Wafer Defect Inspection System Production (Units) by Application (2020-2025)   92

Table 62. Global SiC & GaN Wafer Defect Inspection System Production (Units) by Application (2026-2031)   92

Table 63. Global SiC & GaN Wafer Defect Inspection System Production Market Share by Application (2020-2025)      92

Table 64. Global SiC & GaN Wafer Defect Inspection System Production Market Share by Application (2026-2031)      93

Table 65. Global SiC & GaN Wafer Defect Inspection System Production Value (US$ Million) by Application (2020-2025)       94

Table 66. Global SiC & GaN Wafer Defect Inspection System Production Value (US$ Million) by Application (2026-2031)       94

Table 67. Global SiC & GaN Wafer Defect Inspection System Production Value Market Share by Application (2020-2025)      94

Table 68. Global SiC & GaN Wafer Defect Inspection System Production Value Market Share by Application (2026-2031)      95

Table 69. Global SiC & GaN Wafer Defect Inspection System Price (K US$/Unit) by Application (2020-2025)          95

Table 70. Global SiC & GaN Wafer Defect Inspection System Price (K US$/Unit) by Application (2026-2031)          96

Table 71. Global SiC & GaN Wafer Defect Inspection System Production (Units) by Technology (2020-2025)  97

Table 72. Global SiC & GaN Wafer Defect Inspection System Production (Units) by Technology (2026-2031)  97

Table 73. Global SiC & GaN Wafer Defect Inspection System Production Market Share by Technology (2020-2025)     98

Table 74. Global SiC & GaN Wafer Defect Inspection System Production Market Share by Technology (2026-2031)     98

Table 75. Global SiC & GaN Wafer Defect Inspection System Production Value (US$ Million) by Technology (2020-2025)       99

Table 76. Global SiC & GaN Wafer Defect Inspection System Production Value (US$ Million) by Technology (2026-2031)       100

Table 77. Global SiC & GaN Wafer Defect Inspection System Production Value Market Share by Technology (2020-2025)     100

Table 78. Global SiC & GaN Wafer Defect Inspection System Production Value Market Share by Technology (2026-2031)     100

Table 79. Global SiC & GaN Wafer Defect Inspection System Price (K US$/Unit) by Technology (2020-2025)         101

Table 80. Global SiC & GaN Wafer Defect Inspection System Price (K US$/Unit) by Technology (2026-2031)         102

Table 81. Global SiC & GaN Wafer Defect Inspection System Production (Units) by Application (2020-2025)   103

Table 82. Global SiC & GaN Wafer Defect Inspection System Production (Units) by Application (2026-2031)   103

Table 83. Global SiC & GaN Wafer Defect Inspection System Production Market Share by Application (2020-2025)      104

Table 84. Global SiC & GaN Wafer Defect Inspection System Production Market Share by Application (2026-2031)      104

Table 85. Global SiC & GaN Wafer Defect Inspection System Production Value (US$ Million) by Application (2020-2025)       105

Table 86. Global SiC & GaN Wafer Defect Inspection System Production Value (US$ Million) by Application (2026-2031)       106

Table 87. Global SiC & GaN Wafer Defect Inspection System Production Value Market Share by Application (2020-2025)      106

Table 88. Global SiC & GaN Wafer Defect Inspection System Production Value Market Share by Application (2026-2031)      106

Table 89. Global SiC & GaN Wafer Defect Inspection System Price (K US$/Unit) by Application (2020-2025)          107

Table 90. Global SiC & GaN Wafer Defect Inspection System Price (K US$/Unit) by Application (2026-2031)          108

Table 91. Global SiC & GaN Wafer Defect Inspection System Market Value by End User, (US$ Million) & (2024 VS 2031)  109

Table 92. Global SiC & GaN Wafer Defect Inspection System Production (Units) by Technology (2020-2025)  111

Table 93. Global SiC & GaN Wafer Defect Inspection System Production (Units) by Technology (2026-2031)  111

Table 94. Global SiC & GaN Wafer Defect Inspection System Production Market Share by Technology (2020-2025)     112

Table 95. Global SiC & GaN Wafer Defect Inspection System Production Market Share by Technology (2026-2031)     112

Table 96. Global SiC & GaN Wafer Defect Inspection System Production Value (US$ Million) by Technology (2020-2025)       113

Table 97. Global SiC & GaN Wafer Defect Inspection System Production Value (US$ Million) by Technology (2026-2031)       114

Table 98. Global SiC & GaN Wafer Defect Inspection System Production Value Market Share by Technology (2020-2025)     114

Table 99. Global SiC & GaN Wafer Defect Inspection System Production Value Market Share by Technology (2026-2031)     114

Table 100. Global SiC & GaN Wafer Defect Inspection System Price (K US$/Unit) by Technology (2020-2025)         115

Table 101. Global SiC & GaN Wafer Defect Inspection System Price (K US$/Unit) by Technology (2026-2031)         116

Table 102. Global SiC & GaN Wafer Defect Inspection System Production (Units) by Application (2020-2025)   117

Table 103. Global SiC & GaN Wafer Defect Inspection System Production (Units) by Application (2026-2031)   117

Table 104. Global SiC & GaN Wafer Defect Inspection System Production Market Share by Application (2020-2025)      118

Table 105. Global SiC & GaN Wafer Defect Inspection System Production Market Share by Application (2026-2031)      118

Table 106. Global SiC & GaN Wafer Defect Inspection System Production Value (US$ Million) by Application (2020-2025)            119

Table 107. Global SiC & GaN Wafer Defect Inspection System Production Value (US$ Million) by Application (2026-2031)            119

Table 108. Global SiC & GaN Wafer Defect Inspection System Production Value Market Share by Application (2020-2025)          120

Table 109. Global SiC & GaN Wafer Defect Inspection System Production Value Market Share by Application (2026-2031)          120

Table 110. Global SiC & GaN Wafer Defect Inspection System Price (K US$/Unit) by Application (2020-2025)          121

Table 111. Global SiC & GaN Wafer Defect Inspection System Price (K US$/Unit) by Application (2026-2031)          121

Table 112. KLA Corporation SiC & GaN Wafer Defect Inspection System Company Information         123

Table 113. Main KLA systems that are explicitly positioned for SiC / GaN wafer & device defect inspection      124

Table 114. KLA Corporation SiC & GaN Wafer Defect Inspection System Specification and Application 124

Table 115. KLA’s SiC / GaN Wafer Defect Inspection – Advantages, Weaknesses & Roadmap     130

Table 116. KLA Corporation SiC & GaN Wafer Defect Inspection System Production (Units), Value (US$ Million), Price (K US$/Unit) and Gross Margin (2020-2025)       132

Table 117. KLA Corporation Main Business and Markets Served   132

Table 118. KLA Corporation Recent Developments/Updates        138

Table 119. Lasertec SiC & GaN Wafer Defect Inspection System Company Information          140

Table 120. Lasertec SiC & GaN Wafer Defect Inspection System Specification and Application     140

Table 121. Lasertec Strengths, Weaknesses and Roadmap for Lasertec WBG Wafer Inspection   144

Table 122. Lasertec SiC & GaN Wafer Defect Inspection System Production (Units), Value (US$ Million), Price (K US$/Unit) and Gross Margin (2020-2025)    147

Table 123. Lasertec Main Business and Markets Served 148

Table 124. Lasertec Recent Developments/Updates     150

Table 125. Onto Innovation SiC & GaN Wafer Defect Inspection System Company Information         150

Table 126. Onto Innovation SiC & GaN Wafer Defect Inspection System Specification and Application (Celero™ PL System)       151

Table 127. Onto Innovation Strengths, weaknesses and roadmap in SiC/GaN defect inspection  153

Table 128. Onto Innovation SiC & GaN Wafer Defect Inspection System Production (Units), Value (US$ Million), Price (K US$/Unit) and Gross Margin (2020-2025)       156

Table 129. Onto Innovation Main Business and Markets Served    156

Table 130. Onto Innovation Recent Developments/Updates         158

Table 131. Visiontec Group SiC & GaN Wafer Defect Inspection System Company Information         158

Table 132. Visiontec Group SiC & GaN Wafer Defect Inspection System Specification and Application 159

Table 133. Visiontec SiC & GaN Wafer Defect Inspection Portfolio 161

Table 134. Visiontec Group Strengths, Weaknesses and Roadmap 162

Table 135. Visiontec Group SiC & GaN Wafer Defect Inspection System Production (Units), Value (US$ Million), Price (K US$/Unit) and Gross Margin (2020-2025)       163

Table 136. Visiontec Group Main Business and Markets Served    163

Table 137. Nanotronics SiC & GaN Wafer Defect Inspection System Company Information          164

Table 138. Nanotronics SiC & GaN Wafer Defect Inspection System Specification and Application 165

Table 139. Nanotronics SiC & GaN Wafer Defect Inspection System Production (Units), Value (US$ Million), Price (K US$/Unit) and Gross Margin (2020-2025)       167

Table 140. Nanotronics Main Business and Markets Served         168

Table 141. Nanotronics Recent Developments/Updates  168

Table 142. TASMIT, Inc. SiC & GaN Wafer Defect Inspection System Company Information          170

Table 143. Main product lines relevant to SiC & GaN wafer defect inspection            171

Table 144. TASMIT, Inc. SiC & GaN Wafer Defect Inspection System Specification and Application 172

Table 145. TASMIT, Inc. Strengths, weaknesses & roadmap in SiC/GaN wafer defect inspection  177

Table 146. TASMIT, Inc. SiC & GaN Wafer Defect Inspection System Production (Units), Value (US$ Million), Price (K US$/Unit) and Gross Margin (2020-2025)       179

Table 147. TASMIT, Inc. Main Business and Markets Served        179

Table 148. Bruker SiC & GaN Wafer Defect Inspection System Company Information          180

Table 149. Bruker SiC & GaN Wafer Defect Inspection System Specification and Application     181

Table 150. Bruker Strengths, weaknesses and roadmap in SiC/GaN defect inspection           184

Table 151. Bruker SiC & GaN Wafer Defect Inspection System Production (Units), Value (US$ Million), Price (K US$/Unit) and Gross Margin (2020-2025)    186

Table 152. Bruker Main Business and Markets Served    186

Table 153. HORIBA SiC & GaN Wafer Defect Inspection System Company Information          190

Table 154. HORIBA Key HORIBA / EtaMax Systems for SiC & GaN Wafer Defect Inspection  191

Table 155. MiPLATO-SiC General Specification 199

Table 156. HORIBA MiPLATO-SiC Utility.        200

Table 157. MiPLATO-LED General Specification.           200

Table 158. Plato Series General Specification.  201

Table 159. HORIBA Technical Strengths, Weaknesses & Future Direction            202

Table 160. HORIBA SiC & GaN Wafer Defect Inspection System Production (Units), Value (US$ Million), Price (K US$/Unit) and Gross Margin (2020-2025)    204

Table 161. HORIBA Main Business and Markets Served  204

Table 162. HORIBA Recent Developments/Updates       206

Table 163. LAZIN CO.,LTD SiC & GaN Wafer Defect Inspection System Company Information         208

Table 164. LAZIN CO.,LTD SiC & GaN Wafer Defect Inspection System Specification and Application 208

Table 165. LAZIN CO.,LTD SiC & GaN Wafer Defect Inspection System Production (Units), Value (US$ Million), Price (K US$/Unit) and Gross Margin (2020-2025)       209

Table 166. LAZIN CO.,LTD Main Business and Markets Served     210

Table 167. EtaMax SiC & GaN Wafer Defect Inspection System Company Information          210

Table 168. EtaMax SiC & GaN Wafer Defect Inspection System Specification and Application     211

Table 169. EtaMax SiC & GaN Wafer Defect Inspection System Production (Units), Value (US$ Million), Price (K US$/Unit) and Gross Margin (2020-2025)    215

Table 170. EtaMax Main Business and Markets Served   215

Table 171. Spirox Corporation SiC & GaN Wafer Defect Inspection System Company Information         216

Table 172. Spirox Corporation SiC & GaN Wafer Defect Inspection System Specification and Application 217

Table 173. Spirox Corporation SiC & GaN Wafer Defect Inspection System Production (Units), Value (US$ Million), Price (K US$/Unit) and Gross Margin (2020-2025)       220

Table 174. Spirox Corporation Main Business and Markets Served 220

Table 175. Spirox Corporation Recent Developments/Updates     221

Table 176. Angkun Vision (Beijing) Technology SiC & GaN Wafer Defect Inspection System Company Information          222

Table 177. Angkun Vision (Beijing) Technology SiC & GaN Wafer Defect Inspection System Specification and Application 222

Table 178. Angkun Vision (Beijing) Technology SiC & GaN Wafer Defect Inspection System Production (Units), Value (US$ Million), Price (K US$/Unit) and Gross Margin (2020-2025)       223

Table 179. Angkun Vision (Beijing) Technology Main Business and Markets Served   223

Table 180. Shenzhen Glint Vision SiC & GaN Wafer Defect Inspection System Company Information         224

Table 181. Shenzhen Glint Vision SiC & GaN Wafer Defect Inspection System Specification and Application 225

Table 182. Shenzhen Glint Vision SiC & GaN Wafer Defect Inspection System Production (Units), Value (US$ Million), Price (K US$/Unit) and Gross Margin (2020-2025)       226

Table 183. Shenzhen Glint Vision Main Business and Markets Served            226

Table 184. CETC Fenghua Information Equipment SiC & GaN Wafer Defect Inspection System Company Information          227

Table 185. CETC Fenghua Information Equipment SiC & GaN Wafer Defect Inspection System Specification and Application 227

Table 186. CETC Fenghua Information Equipment SiC & GaN Wafer Defect Inspection System Production (Units), Value (US$ Million), Price (K US$/Unit) and Gross Margin (2020-2025)       232

Table 187. CETC Fenghua Information Equipment Main Business and Markets Served   232

Table 188. CASI Vision Technology (Luoyang) Co., Ltd SiC & GaN Wafer Defect Inspection System Company Information 233

Table 189. CASI Vision Technology (Luoyang) Co., Ltd SiC & GaN Wafer Defect Inspection System Specification and Application   234

Table 190. CASI Vision Technology (Luoyang) Co., Ltd SiC & GaN Wafer Defect Inspection System Production (Units), Value (US$ Million), Price (K US$/Unit) and Gross Margin (2020-2025)      235

Table 191. CASI Vision Technology (Luoyang) Co., Ltd Main Business and Markets Served    235

Table 192. Shanghai Youruipu Semiconductor Equipment SiC & GaN Wafer Defect Inspection System Company Information 236

Table 193. Shanghai Youruipu Semiconductor Equipment SiC & GaN Wafer Defect Inspection System Specification and Application   236

Table 194. Shanghai Youruipu Semiconductor Equipment SiC & GaN Wafer Defect Inspection System Production (Units), Value (US$ Million), Price (K US$/Unit) and Gross Margin (2020-2025)      240

Table 195. Shanghai Youruipu Semiconductor Equipment Main Business and Markets Served    241

Table 196. Dalian Chuangrui Spectral Technology Co., Ltd SiC & GaN Wafer Defect Inspection System Company Information 242

Table 197. Dalian Chuangrui Spectral Technology Co., Ltd SiC & GaN Wafer Defect Inspection System Specification and Application   242

Table 198. Dalian Chuangrui Spectral Technology Co., Ltd SiC & GaN Wafer Defect Inspection System Production (Units), Value (US$ Million), Price (K US$/Unit) and Gross Margin (2020-2025)      244

Table 199. Dalian Chuangrui Spectral Technology Co., Ltd Main Business and Markets Served    244

Table 200. T-Vision.AI (Hangzhou) Tech Co.,Ltd. SiC & GaN Wafer Defect Inspection System Company Information          245

Table 201. T-Vision.AI (Hangzhou) Tech Co.,Ltd. SiC & GaN Wafer Defect Inspection System Specification and Application 245

Table 202. T-Vision.AI (Hangzhou) Tech Co.,Ltd. SiC & GaN Wafer Defect Inspection System Production (Units), Value (US$ Million), Price (K US$/Unit) and Gross Margin (2020-2025)       246

Table 203. T-Vision.AI (Hangzhou) Tech Co.,Ltd. Main Business and Markets Served   247

Table 204. HGTECH SiC & GaN Wafer Defect Inspection System Company Information          247

Table 205. HGTECH SiC & GaN Wafer Defect Inspection System Specification and Application     248

Table 206. HGTECH SiC & GaN Wafer Defect Inspection System Production (Units), Value (US$ Million), Price (K US$/Unit) and Gross Margin (2020-2025)    248

Table 207. HGTECH Main Business and Markets Served 249

Table 208. Olympus SiC & GaN Wafer Defect Inspection System Company Information          249

Table 209. Olympus SiC & GaN Wafer Defect Inspection System Specification and Application     250

Table 210. Olympus SiC & GaN Wafer Defect Inspection System Production (Units), Value (US$ Million), Price (K US$/Unit) and Gross Margin (2020-2025)    251

Table 211. Olympus Main Business and Markets Served 251

Table 212. Nikon SiC & GaN Wafer Defect Inspection System Company Information          253

Table 213. Nikon SiC & GaN Wafer Defect Inspection System Specification and Application     253

Table 214. Nikon SiC & GaN Wafer Defect Inspection System Production (Units), Value (US$ Million), Price (K US$/Unit) and Gross Margin (2020-2025)    254

Table 215. Nikon Main Business and Markets Served     255

Table 216. Leica Microsystems SiC & GaN Wafer Defect Inspection System Company Information         256

Table 217. Leica Microsystems SiC & GaN Wafer Defect Inspection System Specification and Application 256

Table 218. Leica Microsystems SiC & GaN Wafer Defect Inspection System Production (Units), Value (US$ Million), Price (K US$/Unit) and Gross Margin (2020-2025)       257

Table 219. Leica Microsystems Main Business and Markets Served            257

Table 220. Rigaku SiC & GaN Wafer Defect Inspection System Company Information          258

Table 221. Rigaku SiC & GaN Wafer Defect Inspection System Specification and Application     259

Table 222. Rigaku SiC & GaN Wafer Defect Inspection System Production (Units), Value (US$ Million), Price (K US$/Unit) and Gross Margin (2020-2025)    259

Table 223. Rigaku Main Business and Markets Served    260

Table 224. Attolight SiC & GaN Wafer Defect Inspection System Company Information          260

Table 225. Attolight SiC & GaN Wafer Defect Inspection System Specification and Application     261

Table 226. Attolight SiC & GaN Wafer Defect Inspection System Production (Units), Value (US$ Million), Price (K US$/Unit) and Gross Margin (2020-2025)    262

Table 227. Attolight Main Business and Markets Served 262

Table 228. Key Raw Materials Lists   263

Table 229. Raw Materials Key Suppliers Lists  264

Table 230. SiC & GaN Wafer Defect Inspection System Customers List            268

Table 231. SiC & GaN Wafer Defect Inspection System Market Trends            270

Table 232. SiC & GaN Wafer Defect Inspection System Market Drivers            272

Table 233. SiC & GaN Wafer Defect Inspection System Market Challenges            275

Table 234. SiC & GaN Wafer Defect Inspection System Market Restraints            277

Table 235. Research Programs/Design for This Report  282

Table 236. Key Data Information from Secondary Sources          286

Table 237. Key Data Information from Primary Sources  286

Table 238. Authors List of This Report          287

List of Figures

Figure 1. Product Picture of SiC & GaN Wafer Defect Inspection System            2

Figure 2. Global SiC & GaN Wafer Defect Inspection System Market Value by Technology, (US$ Million) & (2024 VS 2031)   3

Figure 3. Global SiC & GaN Wafer Defect Inspection System Market Share by Technology: 2024 VS 2031 4

Figure 4. Optical Inspection System (Photoluminescence) Product Picture            8

Figure 5. X-ray Diffraction Imaging (XRDI) System Product Picture            9

Figure 6. Optical Microscopy (OM)     17

Figure 7. Global SiC & GaN Wafer Defect Inspection System Market Value by Application, (US$ Million) & (2024 VS 2031)    26

Figure 8. Global SiC & GaN Wafer Defect Inspection System Market Share by Application: 2024 VS 2031 27

Figure 9. SiC Substrate      29

Figure 10. SiC Epitaxy        32

Figure 11. SiC Devices Manufacturing 33

Figure 12. Free-standing GaN Substrate Wafer            34

Figure 13. GaN Epitaxy       35

Figure 14. GaN Devices Manufacturing           36

Figure 15. Global SiC & GaN Wafer Defect Inspection System Market Value by End User, (US$ Million) & (2020-2031)      38

Figure 16. Global SiC & GaN Wafer Defect Inspection System Market Share by End User: 2024 VS 2031            38

Figure 17. Global SiC & GaN Wafer Defect Inspection System Production Value (US$ Million), 2020 VS 2024 VS 2031   39

Figure 18. Global SiC & GaN Wafer Defect Inspection System Production Value (US$ Million) & (2020-2031)   40

Figure 19. Global SiC & GaN Wafer Defect Inspection System Production Capacity (Units) & (2020-2031)      40

Figure 20. Global SiC & GaN Wafer Defect Inspection System Production (Units) & (2020-2031)      41

Figure 21. Global SiC & GaN Wafer Defect Inspection System Average Price (K US$/Unit) & (2020-2031)          42

Figure 22. Global SiC Power Devices Market Size (US$ Million) & (2020-2031)    43

Figure 23. Global GaN Devices Market Size (US$ Million) & (2020-2031)            44

Figure 24. SiC & GaN Wafer Defect Inspection System Report Years Considered          46

Figure 25. SiC & GaN Wafer Defect Inspection System Production Share by Manufacturers in 2024       49

Figure 26. SiC & GaN Wafer Defect Inspection System Production Value Share by Manufacturers in 2024   52

Figure 27. The Global 3 and 5 Largest Players: Market Share by SiC & GaN Wafer Defect Inspection System Revenue in 2024        58

Figure 28. Global SiC & GaN Wafer Defect Inspection System Production Value Comparison by Region: 2020 VS 2024 VS 2031 (US$ Million)            61

Figure 29. Global SiC & GaN Wafer Defect Inspection System Production Value Market Share by Region: 2020 VS 2024 VS 2031 62

Figure 30. Global SiC & GaN Wafer Defect Inspection System Production Comparison by Region: 2020 VS 2024 VS 2031 (Units) 65

Figure 31. Global SiC & GaN Wafer Defect Inspection System Production Market Share by Region: 2020 VS 2024 VS 2031        65

Figure 32. North America SiC & GaN Wafer Defect Inspection System Production Value (US$ Million) Growth Rate (2020-2031)           69

Figure 33. China SiC & GaN Wafer Defect Inspection System Production Value (US$ Million) Growth Rate (2020-2031)         70

Figure 34. Japan SiC & GaN Wafer Defect Inspection System Production Value (US$ Million) Growth Rate (2020-2031) 70

Figure 35. South Korea SiC & GaN Wafer Defect Inspection System Production Value (US$ Million) Growth Rate (2020-2031)           71

Figure 36. China Taiwan SiC & GaN Wafer Defect Inspection System Production Value (US$ Million) Growth Rate (2020-2031)           72

Figure 37. Singapore SiC & GaN Wafer Defect Inspection System Production Value (US$ Million) Growth Rate (2020-2031) 72

Figure 38. Global SiC & GaN Wafer Defect Inspection System Consumption by Region: 2020 VS 2024 VS 2031 (Units)     75

Figure 39. Global SiC & GaN Wafer Defect Inspection System Consumption Market Share by Region: 2020 VS 2024 VS 2031        76

Figure 40. North America SiC & GaN Wafer Defect Inspection System Consumption and Growth Rate (2020-2031) & (Units)   78

Figure 41. Europe SiC & GaN Wafer Defect Inspection System Consumption and Growth Rate (2020-2031) & (Units)       79

Figure 42. China SiC & GaN Wafer Defect Inspection System Consumption and Growth Rate (2020-2031) & (Units)       80

Figure 43. Japan SiC & GaN Wafer Defect Inspection System Consumption and Growth Rate (2020-2031) & (Units)       81

Figure 44. South Korea SiC & GaN Wafer Defect Inspection System Consumption and Growth Rate (2020-2031) & (Units)   82

Figure 45. China Taiwan SiC & GaN Wafer Defect Inspection System Consumption and Growth Rate (2020-2031) & (Units)   83

Figure 46. Singapore SiC & GaN Wafer Defect Inspection System Consumption and Growth Rate (2020-2031) & (Units)   84

Figure 47. Malaysia SiC & GaN Wafer Defect Inspection System Consumption and Growth Rate (2020-2031) & (Units)       85

Figure 48. Global Production Market Share of SiC & GaN Wafer Defect Inspection System by Technology (2020-2031)           88

Figure 49. Global Production Value Market Share of SiC & GaN Wafer Defect Inspection System by Technology (2020-2031)           90

Figure 50. Global SiC & GaN Wafer Defect Inspection System Price (K US$/Unit) by Technology (2020-2031)         91

Figure 51. Global Production Market Share of SiC & GaN Wafer Defect Inspection System by Application (2020-2031)            93

Figure 52. Global Production Value Market Share of SiC & GaN Wafer Defect Inspection System by Application (2020-2031)            95

Figure 53. Global SiC & GaN Wafer Defect Inspection System Price (K US$/Unit) by Application (2020-2031)          96

Figure 54. Global Production Market Share of SiC & GaN Wafer Defect Inspection System by Technology (2020-2031)           99

Figure 55. Global Production Value Market Share of SiC & GaN Wafer Defect Inspection System by Technology (2020-2031)           101

Figure 56. Global SiC & GaN Wafer Defect Inspection System Price (K US$/Unit) by Technology (2020-2031)         102

Figure 57. Global Production Market Share of SiC & GaN Wafer Defect Inspection System by Application (2020-2031)            105

Figure 58. Global Production Value Market Share of SiC & GaN Wafer Defect Inspection System by Application (2020-2031)            107

Figure 59. Global SiC & GaN Wafer Defect Inspection System Price (K US$/Unit) by Application (2020-2031)          108

Figure 60. Global SiC & GaN Wafer Defect Inspection System Market Value by End User, (US$ Million) & (2020-2031)      109

Figure 61. Global SiC & GaN Wafer Defect Inspection System Market Share by End User: 2024 VS 2031            110

Figure 62. Global Production Market Share of SiC & GaN Wafer Defect Inspection System by Technology (2020-2031)           113

Figure 63. Global Production Value Market Share of SiC & GaN Wafer Defect Inspection System by Technology (2020-2031)           115

Figure 64. Global SiC & GaN Wafer Defect Inspection System Price (K US$/Unit) by Technology (2020-2031)         116

Figure 65. Global Production Market Share of SiC & GaN Wafer Defect Inspection System by Application (2020-2031)            118

Figure 66. Global Production Value Market Share of SiC & GaN Wafer Defect Inspection System by Application (2020-2031)            121

Figure 67. Global SiC & GaN Wafer Defect Inspection System Price (K US$/Unit) by Application (2020-2031)          122

Figure 68. SiC & GaN Wafer Defect Inspection System Value Chain            263

Figure 69. Bottom-up and Top-down Approaches for This Report 284

Figure 70. Data Triangulation           285

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