CVD/ALD/SOD前駆体:誘電体レポート 2022年

出版:Techcet(テクセット) 出版年月:2022年6月

Dielectrics Report: 2022 CMR™ CVD/ALD/SOD Precursors
CVD/ALD/SOD前駆体:誘電体レポート 2022年

ページ数 302
図表数 97
価格(サイトライセンス) US$8,900.00
種別 英文調査報告書

レポート目次    お問合せ・ご注文    価格・納期について

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Techcet「CVD/ALD/SOD前駆体:誘電体レポート 2022年 – Dielectrics Report: 2022 CMR™ CVD/ALD/SOD Precursors」は半導体製造向け化学気相成長(CVD)/原子層堆積法(ALD)/SOD前駆体(プリカーサー)を調査・分析しています。また材料サプライチェーンにおける課題や動向、サプライヤの市場シェアについての評価、材料セグメント予測など、絶縁前駆体関連の主要サプライヤ情報を提供しています。

レポート概要

  • 無機プリカーサーおよび有機プリカーサーに関する市場および技術動向に関する情報を提供。ILDs&Low-k絶縁体、ハードマスク、側壁スペーサ、エッチストップ層を含むCVD、ALD、SOD用途についても解説。
  • サプライチェーンマネージャー、生産統合、R&D管理者、事業開発、財務アナリストに関する情報
  • 主要サプライヤ、材料供給における問題/動向、サプライヤの市場シェア評価、材料市場予測

主な掲載内容

  1. エグゼクティブサマリー
  2. 調査範囲、目的、メソドロジー
  3. 半導体産業の市場状況と展望
    1. 世界経済
    2. 電子製品市場
    3. 半導体製造の成長と拡大
    4. 政策&貿易引動向と影響
    5. 半導体材料展望
  4. 前駆体(プリカーサー)市場動向
    1. 市場動向
    2. 供給能力と需要、投資
    3. 技術的促進要因/材料の変遷と移行
    4. IP動向と誘電体
    5. EHSと物流問題
    6. 標準実装/バルブ種類における変化
    7. 市場評価
  5. 市場状況と予測
    1. 前駆体市場の統計データと予測
    2. M&A活動
    3. 新規工場
    4. 新規参入者
  6. サブティア材料サプライチェーン
  7. サプライヤ情報

Overview

  • Provides market and technical trend information on organic and inorganic precursors, addressing CVD, ALD, and SOD applications including ILDs & low-κ dielectrics, hard masks, sidewall spacers and etch stop layers
  • Provides focused information for supply-chain managers, process integration and R&D directors, as well as business development and financial analysts
  • Covers information about key suppliers, issues/trends in the material supply chain, estimates on supplier market share, and forecast for the material segments

Analyst

Jonas Sundqvist, Ph.D.

  • Sr. Technology Analyst of TECHCET— covers Electronic Gases and ALD & CVD precursors and related technologies, and the co-chair of the Annual Critical Materials Council (CMC) Conference. His over 20 years of work experience includes Group Leader of the Thin-Film Technologies Group at The Fraunhofer Institute for Ceramic Technologies and Systems (IKTS) in Germany, Clean Room Operations Manager for Lund Nano Lab, Lund University in Sweden and Group Leader of the ALD & High-k devices group at Fraunhofer’s Center Nanoelectronic Technologies (CNT) in Germany, which included 28nm node work for GLOBALFOUNDRIES Fab1.
  • Previously, at Infineon Memory Development Centre (MDC), he developed high-k and metal nitride ALD processes, and at Qimonda, he was a materials manager focused on the ALD/CVD precursors supply-chain. He holds a Ph.D. and an M.S. in inorganic chemistry from Uppsala University, Sweden & Institute for Micromanufacturing, Louisiana Teche, USA, a B.S. in electrical and electronics engineering from Lars Kagg, and nine patents and 40 related scientific publications.
  • Jonas Sundqvist is on the Scientific Committee for AVS ALD and has co-


目次

1 EXECUTIVE SUMMARY  11

1.1 CVD/ALD/SOD PRECURSORS – MARKET OVERVIEW  12
1.2 SEGMENT REVENUE TRENDS & FORECAST  13
1.3 MARKET TRENDS IMPACTING MATERIALS SEGMENT OUTLOOK  14
1.4 YEAR 2021 IN REVIEW  16
1.5 SEGMENT 5-YEAR REVENUE FORECAST – DIELECTRIC  17
1.6 TECHNOLOGY TRENDS  19
1.7 COMPETITIVE LANDSCAPE  20
1.8 ANALYST ASSESSMENT  21

2 SCOPE, PURPOSE AND   METHODOLOGY  24

2.1 SCOPE  25
2.2 PURPOSE  26
2.3 METHODOLOGY  27
2.4 OVERVIEW OF OTHER TECHCET CMR™ REPORTS  28

3 SEMICONDUCTOR INDUSTRY MARKET STATUS & OUTLOOK  29

3.1 WORLDWIDE ECONOMY  30

3.1.1 SEMICONDUCTOR INDUSTRIES TIES TO THE GLOBAL ECONOMY  32
3.1.2 SEMICONDUCTOR SALES GROWTH 33
3.1.3 TAIWAN MONTHLY SALES TRENDS 34

3.2 ELECTRONIC GOODS MARKET  35

3.2.1 SMARTPHONES 36
3.2.2 PC UNIT SHIPMENTS 37
3.2.1.1 ELECTRIC VEHICLE (EV) MARKET TRENDS 38
3.2.1.2 INCREASE IN SEMICONDUCTOR CONTENT FOR AUTOS 39
3.2.2 SERVERS / IT MARKET 40

3.3 SEMICONDUCTOR FABRICATION GROWTH & EXPANSION  41

3.3.1 FAB EXPANSION ANNOUNCEMENT SUMMARY  42
3.3.2 WW FAB EXPANSION DRIVING GROWTH  43
3.3.3 EQUIPMENT SPENDING TRENDS 44
3.3.4 TECHNOLOGY ROADMAPS 45
3.3.5 FAB INVESTMENT ASSESSMENT 46

3.4 POLICY & TRADE TRENDS AND IMPACT  47

3.4.1POLICY AND TRADE ISSUES 48

3.5 SEMICONDUCTOR MATERIALS OUTLOOK  49

3.5.1 COULD MATERIALS CAPACITY LIMIT CHIP PRODUCTION SCHEDULES? 50
3.5.2 CONTINUED LOGISTICS ISSUES PLAGUE THE WESTERN WORLD 51
3.5.3 TECHCET WAFER STARTS FORECAST THROUGH 2026 52
3.5.4 TECHCET WAFER START FORECAST 53
3.5.5 TECHCET’S MATERIALS FORECAST  54

4 PRECURSOR MARKET TRENDS  55

4.1 MARKET TRENDS  56

4.1.1 MARKET TRENDS – WAFER STARTS 59
4.1.2 MARKET TRENDS – WAFER STARTS LOGIC 60
4.1.3 MARKET TRENDS – WAFER STARTS DRAM 61
4.1.4 MARKET TRENDS – WAFER STARTS NAND 62

4.2 SUPPLY CAPACITY AND DEMAND, INVESTMENTS 63

4.3 TECHNICAL DRIVERS / MATERIAL CHANGES AND TRANSITIONS  65

4.3.1 GENERAL TREND LAST DECADE GOING FROM PVD & LPCVD TO PECVD 66
4.3.2  DEVICE ROADMAP  67
4.3.3  LEADING EDGE DEVICE ARCHITECTURE 68
4.3.4  LEADING EDGE LOGIC ROADMAP 69
4.3.5.1 DRAM DEPOSITION APPLICATIONS 70
4.3.5.2 3DNAD DEPOSITION APPLICATIONS 71
4.3.6 AN OVERVIEW OF SILICON CARBIDE AND GALLIUM NITRIDE  72
4.3.6.1 AN OVERVIEW OF SILICON CARBIDE AND GALLIUM NITRIDE  73
4.3.6.2 AN OVERVIEW OF SILICON CARBIDE AND GALLIUM NITRIDE 74
4.3.6.3 AN OVERVIEW OF SILICON CARBIDE AND GALLIUM NITRIDE 75
4.3.7 AN OVERVIEW OF SILICON CARBIDE AND GALLIUM NITRIDE (MOCVD) 76
4.3.7.1 AN OVERVIEW OF SILICON CARBIDE AND GALLIUM NITRIDE (MOCVD)  77
4.3.7.2 AN OVERVIEW OF SILICON CARBIDE AND GALLIUM NITRIDE (MOCVD)  78

4.4 IP TRENDS DIELECTRICS  79

4.4.1 ALD DIELECTRICS FOR PHOTOLITHOGRAPHY IP 80
4.4.2 TOP OEMS FILING ALD PATTERNING IP 81
4.4.3 AREA SELECTIVE DEPOSITION 82
4.4.4 DRAM APPLICATION CASE – STI MODULE 83
4.5.1 REGIONAL TRENDS – DIELECTRIC PRECURSORS 84
4.5.2 REGIONAL TRENDS – TOTAL PRECURSOR MARKET  85
4.5.3 REGIONAL TRENDS AND DRIVERS 86

4.6 EHS AND LOGISTIC ISSUES  88

4.6.1 EHS AND LOGISTIC ISSUES – GREEN HOUSE GASES FROM LOGIC PRODUCTION 89

4.7 CHANGES IN STANDARD PACKAGING/VALVE TYPES 90

4.8 MARKET ASSESSMENT  91

5 SEGMENT MARKET STATISTICS & FORECASTS  92

5.1 PRECURSOR MARKET – HISTORICAL AND 5-YEAR FORECAST  93

5.1.1 CVD/ALD DIELECTRIC PRECURSOR REVENUE 2020 TO 2026 (M USD) 94
5.1.2 ASSESSMENT DIELECTRIC PRECURSORS 95

5.2 M&A ACTIVITIES  96

5.3 NEW PLANTS  97

5.4 NEW ENTRANTS – EUROPE CHINA ELECTRONIC MATERIALS (CHINA) 98

5.4.1 NEW ENTRANTS – NATA CHEMICALS 99
5.9.2 CHINA ALD DIELECTRIC RECENT DEVELOPMENT 100

5.5 PRICING TRENDS  101

5.6.1 COMPETITIVE LANDSCAPE — PRECURSOR SUPPLIER MARKET SHARE 102
5.6.2 COMPETITIVE LANDSCAPE — PRECURSOR MARKET BY REGION 103
5.6.3 COMPETITIVE LANDSCAPE — PROCESS TOOLS 104
5.6.4 COMPETITIVE LANDSCAPE — PROCESS TOOL FORECAST GROWTH 105
5.6.5 LONG TERM AND 5-YEAR WAFER EQUIPMENT FORECAST 106
5.6.6 PROCESS TOOLS SEGMENTED BY DEPOSITION METHOD 107

5.7 WFE DEPOSITION ASSESSMENT  108

6 SUB TIER MATERIAL SUPPLY CHAIN  109

6.1 SUB-TIER SUPPLY-CHAIN: INTRODUCTION  110
6.2 SUB-TIER SUPPLY-CHAIN M&A ACTIVITY  111
6.3 SUB-TIER SUPPLY-CHAIN EHS AND LOGISTICS ISSUES  112

ADEKA Corporation
Air Liquide
AZmax Co., Ltd
And more

Figures &Tables

FIGURES

FIGURE 1: TOTAL PRECURSOR MARKET (M USD) 13
FIGURE 2: TOTAL PRECURSOR MARKET (M USD) 16
FIGURE 3: CVD/ALD METAL & HIGH-K PRECURSOR REVENUE 2020 TO 2026 (MUSD) 17
FIGURE 4: DIELECTRIC PRECURSOR MARKET 2020 TO 2026 19
FIGURE 5: GLOBAL ADVANCED PRECURSOR MARKET 2021 (USD) 22
FIGURE 6: GLOBAL ECONOMY AND THE ELECTRONICS SUPPLY CHAIN(2021) 35
FIGURE 7: WORLDWIDE SEMICONDUCTOR SALES  36
FIGURE 8: TECHCET’S TAIWAN SEMICONDUCTOR INDUSTRY INDEX* 37
FIGURE 9: 2021 CHIP REVENUE 38
FIGURE 10: MOBILE PHONE SHIPMENTS WW ESTIMATES  39
FIGURE 11: WORLDWIDE PC AND TABLET FORECAST, 2021, Q3 40
FIGURE 12: GLOBAL EV TRENDS 41
FIGURE 13: SEMICONDUCTOR SPEND PER VEHICLE TYPE 42
FIGURE 14: TSMC CONSTRUCTION SITE IN ARIZONA. 44
FIGURE 15: CHIP EXPANSIONS 2021-2026 > US$460 B 45
FIGURE 16: SEMICONDUCTOR CHIP MANUFACTURING REGIONS OF THE WORLD 46
FIGURE 17: 3-MONTH AVERAGE SEMICONDUCTOR EQUIPMENT BILLINGS 47
FIGURE 18: OVERVIEW OF DEVICE TECHNOLOGY ROADMAP 48
FIGURE 19: EUROPE CHIP EXPANSION UPSIDE 53
FIGURE 20: TECHCET WAFER START FORECAST BY NODE 55
FIGURE 21: TECHCET WAFER START FORECAST BY LOGIC NODE 56
FIGURE 22: GLOBAL SEMICONDUCTOR MATERIALS OUTLOOK 57
FIGURE 23: FORECASTS – WAFER STARTS 2018 TO 2026  62
FIGURE 24: FORECASTS – WAFER STARTS LOGIC 300MM 63
FIGURE 25: FORECASTS – WAFER STARTS DRAM 300MM 64
FIGURE 26: ANNUAL WAFER STARTS (MILLIONS OF 200MM EQUIVALENT / YEAR) 65
FIGURE 27:  ZIRCONIUM METAL DEMAND 2021 1.6 MILLION TONNES 68
FIGURE 28: HAFNIUM METAL DEMAND 2021 78 TONNES 68
FIGURE 29: 3DNAND STRUCTURE 69
FIGURE 30: MO PRECURSORS 70
FIGURE 31: W USAGE PER WAFER STARTS 72
FIGURE 32: ANNUAL WAFER STARTS (MILLIONS OF 200MM EQUIVALENT / YEAR) 73
FIGURE 33: ALD DIELECTRICS FOR PHOTOLITHOGRAPHY IP 74
FIGURE 34: DEVICE ARCHITECTURES 75
FIGURE 35: DEVICE ROADMAPS 76
FIGURE 36: IMEC 2021 LOGIC ROADMAP 77
FIGURE 37: SCALING AND LITHOGRAPHY TRENDS 78
FIGURE 38: IMEC 2021 LOGIC ROADMAP 78
FIGURE 39: GENERAL SPACER PROCESS FLOW 83
FIGURE 40: PRECURSORS FOR SPACE DEFINED MULTIPATTERING 83
FIGURE 41: POWER DEVICE APPLICATION OVERVIEW 86
FIGURE 42: POWER MOSFET STRUCTURE 87
FIGURE 43: POWER DEVICE TRADEOFFS 87
FIGURE 44:  MARKET SHARE EPI MOCVD EQUIP. TOTAL AVAILABLE MARKET-  US$700 M   90
FIGURE 45: IP FILING FOR CVD AND ALD DIELECTRIC PRECURSORS 92
FIGURE 46: ALD DIELECTRICS FOR PHOTOLITHOGRAPHY IP  93
FIGURE 47: TOP OEMS: LAM, TEL, ASM AND AMAT FIGURE 94
48: TOPOGRAPHY FOR SELECTIVE SIN    95
FIGURE 49: DRAM APPLICATION CASE – STI MODULE 96
FIGURE 50: 20 NM LINE/SPACE PATTERN FOR EUV METAL RESIST 97
FIGURE 51: 2021 METAL PRECURSOR MARKET SHARE 99
FIGURE 52: HARDMASK, LOW K & DIELCTRIC PRECURSORS REGIONAL SHARES 2021 100
FIGURE 53: TOTAL PRECURSOR MARKETS REGIONAL 2021 USD 1.4 BILLION 101
FIGURE 54: ENVIRONMENTAL FOOTPRINT OF MOORES LAW 114
FIGURE 55: SEGMENTATION OF THE AMPOULE FLEER 2020 BASED ON NUMBER OF UNITS IN THE FIELD 115
FIGURE 56: TOTAL PRECURSOR MARKET (M USD) 118
FIGURE 57: CVD/ALD METAL & HIGH-K PRECURSOR REVENUE 2020 TO 2026 (MUSD) 119
FIGURE 58: CVD/ALD METAL & HIGH-K PRECURSOR REVENUE 2020 TO 2026 (MUSD) 120
FIGURE 59: CVD/ALD METAL & HIGH-K PRECURSOR REVENUE 2020 TO 2026 (MUSD) 121
FIGURE 60: DIELECTRIC PRECURSOR MARKET 2020 TO 2026 122
FIGURE 61: WF6 SUPPLY VS. DEMAND THROUGH 2023 126
FIGURE 62: WF6 SUPPLY VS. DEMAND THROUGH 2025 127
FIGURE 63: UMICORE CO AND PT PRECURSORS 129
FIGURE 64: ECEM PRODUCT OFFERINGS 130
FIGURE 65: SAQP FILM STRUCTURE AND PROCESS FLOW 132
FIGURE 66: TOTAL DIELECTRIC PRECURSOR MARKET SHARE 2021 (US$652 M) 134
FIGURE 67: TOTAL MARKET METAL & HIGH-K PRECURSOR MARKET SHARE 2021 (U$$742 M) 134
FIGURE 68: GLOBAL ADVANCED PRECURSOR MARKET 2021 (USD) 135
FIGURE 69: SEMICONDUCTOR EQUIPMENT SEGMENTATION 136
FIGURE 70: SEMICONDUCTOR EQUIPMENT FORECAST 137
FIGURE 71: SEMICONDUCTOR MARKET SIZE AND OUTLOOK 138
FIGURE 72: SEMICONDUCTOR EQUIPMENT FORECAST 138
FIGURE 73: DEPOSITION SEGMENTS (USD BILLION) 139
FIGURE 74: TYPICAL NON-HALIDE LIGANDS USED FOR ALD PRECURSORS 142
FIGURE 75: WORLDWIDE TUNGSTEN PRODUCTION AND RESERVES 143
FIGURE 76: TUNGSTEN USE BY INDUSTRY (TECHCET ESTIMATE 2020) 144
FIGURE 77: SYSTEM DEFINITION OF THE GLOBAL ANTHROPOGENIC COBALT CYCLE AND MODELING FRAMEWORK FOR COBALT DEMAND AND SECONDARY SUPPLY POTENTIALS. 148

TABLES

TABLE 1: PRECURSOR MARKET GROWTH OVERVIEW 12
TABLE 2: PRECURSOR MARKET SIZE 13
TABLE 3: INDUSTRY AND ECONOMIC SUMMARY 16
TABLE 4: GLOBAL GDP AND SEMICONDUCTOR REVENUES* 33
TABLE 5: IMF ECONOMIC OUTLOOK*  34
TABLE 6: DATA CENTER SYSTEMS AND COMMUNICATION SERVICES FORECAST 2021 43
TABLE 7: OVERVIEW OF DEPOSITION PROCESSES BY DEVICE TYPE AND MATERIAL 79
TABLE 8: DRAM PRECURSOR APPLICATIONS 80
TABLE 9: 3DNAND PRECURSOR APPLICATIONS 81
TABLE 10: LOGIC PRECURSOR APPLICATIONS 82
TABLE 11: GENERAL PRECURSOR TRENDS AND OPPORTUNITIES BY DEVICE TYPE 84
TABLE 12: MOCVD APPLICATIONS – EPI DEPOSITION ON SUBSTRATE   89
TABLE 13: MOCVD EQUIPMENT VENDORS 90
TABLE 14: REGIONAL PRECURSOR TRENDS 98
TABLE 15: REGIONAL MARKETS (US$ MILLIONS) 100
TABLE 16: PRECURSOR MARKET SIZE BY REGION 101
TABLE 17:  REGIONAL PRECURSOR MARKETS 102
TABLE 18:  REGIONAL WAFER MARKETS 103
TABLE 19: PRECURSOR MARKET SIZE 118
TABLE 20: M&A ACTIVITIES 125


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